报告题目：Optical characterization of novel Miniature Microwave Plasma Source

报告人：Ilija Stefanović

报告时间：2024年6月24日下午15：00

报告地点：物科楼101

报告邀请人：徐亮

报告摘要：A newly developed Miniature Microwave Inductive Coupled (MMWICP) plasma source has unique design and posseses some distinguished properties, such as high density of reactive species. The basic properties of MMWICP are investigated by optical imaging, Optical Emission Spectroscopy and Two-Photon Absorption Induced Laser Fluorescence (TALIF) for different discharge regimes and working gases. By using OES and TALIF we show that the atomic oxygen densities are by the order of magnitude better than required. Thin SiOx films are deposited by by combination of two MMWICPs, one operated with oxygen and another with Hexamethyldixiloxan (HDMSO), which serves as a monomer in PECVD.

报告人简介：Ilija Stefanović, Senior Scientist of Ruhr-University Bochum, Germany. Ilija received his PhD in Plasma Sci. and Engineering in 1993 at University of Belgrade, Serbia, School for Electrical Engineering and his Dr.-Sci. in Electrical Engineering and Plasma Science in 1999 at the same University. In 2010 he was appointed Research Professor at Institute of Physics Belgrade, University of Belgrade.In 1998 he was awarded with „Heinrich-Hertz-Foundation“ scholarship of North-Rhine Westphalia, Germany and Fellow of Campus France in 2015. and Technology as one of the ten best articles published in 2013 in this journal. Currently he is a Senior Scientist at Ruhr-University Bochum Institute for Applied Electrodynamics and Plasma Technology, Bochum, Germany.